Three-dimensional Real-time Uninvasive Imaging and Evaluation (TruImagE) system
Digital Holoscope for Micro-optics Metrology
Applications
Quantitative 3D imaging of linear micro-optics
Characterization of single lens
Uniformity inspection of microlens array
Surface profiling with nanometer resolution
Surface roughness measurement
Wavefront analysis and reconstruction
Optical performance analysis
Process monitoring
Feature
Compact
Non contact
Low cost
No complex alignment & adjustment
Physical compensation for environmental vibration and phase curvature
Software customizable to application
Suitable for lab or factory environment
Specifications
Microscope objective
|
10× |
20× |
40× |
60× |
|---|---|---|---|---|
Lateral resolution (µm )
|
4.4 |
2.2 |
1.6 |
1.1 |
Vertical resolution (nm)
|
10 |
10 |
10 |
10 |
Field of view (µm×µm)
|
790×620 |
370×270 |
190×130 |
130×90 |

Almost thousand items...

